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Silicon
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Table of Contents

1 Introduction: Silicon in All Its Forms.- 2 Silicon: the Semiconductor Material.- 3 Silicon: an Industrial Adventure.- 4 Polycrystalline Silicon Films for Electronic Devices.- 5 Silicon for Photovoltaics.- 6 Films by Molecular-Beam Epitaxy.- 7 Amorphous Hydrogenated Silicon, a-Si:H.- 8 Silicon-on-Insulator and Porous Silicon.- 9 Defect Spectroscopy.- 10 Silicon and Its Vital Role in The Evolution of Scanning Probe Microscopy.- 11 Defects, Diffusion, Ion Implantation, Recrystallization, and Dielectrics.- 12 Neutron Transmutation Doping (NTD) of Silicon.- 13 Transition Metal Impurities in Silicon.- 14 Hydrogen.- 15 Power Semiconductor Devices.- 16 Compensation Devices Break the Limit Line of Silicon.- 17 Integrated Circuits.- 18 Silicon Nanoelectronics: the Next 20 Years.- 19 Lithography for Silicon Nanotechnology.- 20 Silicon Sensors.- 21 Supplementing Silicon: the Compound Semiconductors.- 22 Quantum Computation by Electron Spin in SiGe Heterostructures.- 23 Carbon Nanotube Applications in Microelectronics.- 24 Creating Systems for Ambient Intelligence.- 25 Semiconductors with Brain.

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