Basic Theories of Semiconductor Electrochemistry.- Silicon/Electrolyte Interface.- Anodic Oxide.- Etching of Oxides.- Anodic Behavior.- Cathodic Behavior and Redox Couples.- Etching of Silicon.- Porous Silicon.- Summary and Closing Remarks.
`Dr. Zhang provides an encyclopedic compilation of the literature
on the many electrochemical effects that impact the processing of
silicon and its native oxide. This book will be an important
reference for the silicon specialist and may have within its pages
that key detail which will explain process anomalies to the MEMS
practitioner.'
Steve Senturia, Weller Professor of Electrical Engineering,
Massachusetts Institute of Technology
`This book is a must for every laboratory where semiconductor
electrochemsitry is actively pursued. It is a welcome and
recommended addition to every library of an institution where
electrochemistry is a suibject of active research.'
Journal of Solid State Electrochemistry, 7:5
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